chartId,entityId 1994,1 1994,2 1994,3 1994,4 1994,5 1994,6 1994,8 1994,9 1994,10 1994,11 1994,15 1994,19 1994,22 1994,24 1994,25 1994,28 1994,34 1994,39 1994,40 1994,41 1994,42 1994,43 1994,45 1994,60 1994,63 1994,64 1994,65 1994,67 1994,68 1994,70 1994,73 1994,74 1994,76 1994,80 1994,83 1994,84 1994,85 1994,87 1994,89 1994,91 1994,92 1994,95 1994,96 1994,97 1994,98 1994,100 1994,103 1994,105 1994,107 1994,108 1994,109 1994,111 1994,112 1994,113 1994,115 1994,117 1994,119 1994,121 1994,122 1994,125 1994,126 1994,129 1994,130 1994,132 1994,137 1994,138 1994,139 1994,142 1994,143 1994,145 1994,148 1994,149 1994,150 1994,151 1994,153 1994,155 1994,156 1994,158 1994,159 1994,160 1994,161 1994,162 1994,163 1994,165 1994,167 1994,169 1994,170 1994,173 1994,174 1994,195 1994,201 1994,202 1994,204 1994,210 1994,211 1994,212 1994,221 1994,222 1994,223 1994,224